D De Salvador, G Bisognin, M Di Marino, E Napolitani, A Carnera, S Mirabella, E Pecora, E Bruno, F Priolo, H Graoui, MA Foad, F Boscherini
Biblio references: Volume: 26 Issue: 1 Pages: 382-385
Origin: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena